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The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order… (More)
The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.
The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.