M. G. M. Moreno

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Dépôt de couches minces par plasma haute densité à basse pression : influence de l'injection de silane sur la cinétique du dépôt et les propriétés de la silice. Acknowledgements I would like to thank the following people, without whom this work would not have been possible: Prof. Bernard Drévillon, for the opportunity to do my PhD under his supervision.(More)
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