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This paper presents an approach for modeling and realization of an inertial navigation system. This system consists of two new 2-D acceleration sensor arrays, three gyroscopes, digital error correction, gravitation compensation, supporting point inclusion, and software application. Modeling is achieved using SystemC-AMS for analog parts and SystemC for… (More)
This paper reports on the development of a capacitive MEMS acceleration sensor applicable for acoustic emission testing. As a key feature, the sensor consists of two resonators with different resonance frequencies (90 kHz and 110 kHz) and an opposing electrode arrangement improving the rejection of disturbing low-frequency mechanical vibrations. In order to… (More)
The presented paper describes the use of a new approach to develop a high frequency acceleration sensor with good low frequency noise rejection and in contrast to conventional resonant sensors a short settling time, as it is needed for acoustic emission testing.