M.B. Takeyama

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The solid-phase reaction and/or diffusion at the contact interface of a Cu-Zr amorphous alloy film on InP varying the alloy composition around Cu/sub 60/Zr/sub 40/ were investigated so as to examine the correlation with the ohmic behavior of the contacts. The Cu/sub 60/Zr/sub 40//n-InP contact showed a linear I-V characteristic with extremely low contact(More)
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