M. B. Korzenski

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A new mixed alkali/alkaline earth iron phosphate, NaBaFe4(HPO4)3.H2O, has been synthesized hydrothermally and structurally characterized by single-crystal X-ray diffraction, magnetic susceptibility, infrared spectroscopy, and thermogravimetric analysis. The title compound crystallizes in the monoclinic space group P2(1)/c (No. 14) with a = 9.287(2) A, b =(More)
In this paper, we report on the removal of photoresist, post-etch process residues and particles for various patterned semiconductor wafers using supercritical carbon dioxide (SCCO2)/chemical modifier formulations. Optimization of the chemical formulations was determined using data obtained from statistical analysis and designed experiments.(More)
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