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Photonic crystal nanocavities are fabricated in silicon membranes covered by thermally annealed silicon-rich nitride films with Erbium-doped silicon nanocrystals. Silicon nitride films were deposited by sputtering on top of silicon on insulator wafers. The nanocavities were carefully designed in order to enhance emission from the nanocrystal sensitized(More)
Erbium-doped silicon-rich nitride/silicon superlattice structures were fabricated by direct magnetron cosputtering deposition on Si substrates. Rapid thermal annealing resulted in the nucleation of small amorphous Si clusters, which efficiently sensitize 1.54 ␮m emission via a nanosecond-fast nonresonant energy transfer process, providing an alternative(More)
Adding optical functionality to a silicon microelectronic chip is one of the most challenging problems of materials research. Silicon is an indirect-bandgap semiconductor and so is an inefficient emitter of light. For this reason, integration of optically functional elements with silicon microelectronic circuitry has largely been achieved through the use of(More)
Nanostructuring silicon is an effective way to turn silicon into a photonic material. In fact, low-dimensional silicon shows light amplification characteristics, non-linear optical effects, photon confinement in both one and two dimensions, photon trapping with evidence of light localization, and gas-sensing properties.
In this paper, we combine experimental dark-field scattering spectroscopy and accurate electrodynamics calculations to investigate the scattering properties of two-dimensional plasmonic lattices based on the concept of aperiodic order. In particular, by discussing visible light scattering from periodic, Fibonacci, Thue-Morse and Rudin-Shapiro lattices(More)
Defined nanoparticle cluster arrays (NCAs) with total lateral dimensions of up to 25.4 microm x 25.4 microm have been fabricated on top of a 10 nm thin gold film using template-guided self-assembly. This approach provides precise control of the structural parameters in the arrays, allowing a systematic variation of the average number of nanoparticles in the(More)
In this paper we explore the potential of one-dimensional and two-dimensional deterministic aperiodic plasmonic arrays for the design of electromagnetic coupling and plasmon-enhanced, sub-wavelength optical fields on chip-scale devices. In particular, we investigate the spectral, far-field and near-field optical properties of metal nanoparticle arrays(More)
We propose and demonstrate a new SERS substrate architecture that couples a dense three-dimensional (3-D) cavity nanoantenna array, through nano-gaps, with dense plasmonic nanodots; and a new nanofabrication that combines nanoimprint, guided self-assembly and self-alignment and has fabricated the architecture precisely, simply, inexpensively and over large(More)
The accurate and reproducible control of intense electromagnetic fields localized on the nanoscale is essential for the engineering of optical sensors based on the surface-enhanced Raman scattering (SERS) effect. In this paper, using rigorous generalized Mie theory (GMT) calculations and a combined top-down/bottom-up nanofabrication approach, we design and(More)
  • L Dal Negro, J H Yi, V Nguyen, Y Yi, J Michel, L C Kimerling
  • 2005
Light-emitting silicon-rich, SiN x / SiO 2 Thue-Morse ͑T-M͒ multilayer structures have been fabricated in order to investigate the generation and transmission of light in strongly aperiodic deterministic dielectrics. Photoluminescence and optical transmission data experimentally demonstrate the presence of emission enhancement effects occurring at(More)