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The continuous and rapid increase of areal density in magnetic data storage systems required a continuous increase of the coercivity of the storage media. In order to be able to record on these ever-higher-coercivity media, new soft magnetic materials for pole tips with increased magnetic moment had to be developed. Significant progress has been made during(More)
—An integrated voltage regulator (IVR) is presented that uses custom fabricated thin-film magnetic power induc-tors. The inductors are fabricated on a silicon interposer and integrated with a multi-phase buck converter IC by 2.5D chip stacking. Several inductor design variations have been fabricated and tested. The best performance has been achieved with a(More)
The use of lithography and electroplating to fabricate variable-reluctance, nearly planar, integrated minimotors with 6-mm-diameter rotors on silicon wafers is described. The motors consist of six electroplated Permalloy@ horseshoe-shaped cores that surround the rotor. Copper coils are formed around each core. The Permalloy and copper electroplating baths,(More)
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