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1: The fluidic process for the self-assembly and sealing of liquid-filled MEMS capsules. Self-assembly and sealing are mediated by an insoluble polymeric phase precipitated from a polar solvent. Controlled orbital agitation and sonica-tion of the assembly solution are pivotal to the yield and throughput of the process. ABSTRACT We present a new method to(More)
Structuring SU-8 based superparamagnetic polymer composite (SPMPC) containing Fe 3 O 4 nanoparticles by photolithography is limited in thickness due to light absorption by the nanoparticles. Hence, obtaining thicker structures requires alternative processing techniques. This paper presents a method based on inkjet printing and thermal curing for the(More)
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