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—Silicon fusion and eutectic bonding processes based on the technique of localized heating have been successfully demonstrated. Phosphorus-doped polysilicon and gold films are applied separately in the silicon-to-glass fusion bonding and silicon-to-gold eutectic bonding experiments. These films are patterned as line-shape resistive heaters with widths of 5(More)
—A combination of surface-and bulk-micromachining techniques is used to demonstrate the feasibility of fabricating microhypodermic needles. These microneedles, which may be built with on-board fluid pumps, have potential applications in the chemical and biomedical fields for localized chemical analysis, programmable drug-delivery systems, and very small,(More)
A method of active frequency tuning on comb-shape micro resonators has been successfully demonstrated by means of localized stressing effects. A mechanical beam structure that can be resistively heated to generate thermal stress, is integrated as part of the comb-shape micro resonator for frequency tuning. Experimentally, a frequency change up to 6.5% is(More)
Similar to those of the gills of adults, three types of mitochondria-rich (MR) cells with different morphologies of apical surfaces (wavy convex, shallow basin, and deep hole) were identified on the integument of freshwater-acclimated tilapia larvae (Oreochromis mossambicus). The object of this study is to test the hypothesis that these subtype cells may(More)
This paper presents two types of fuel cells: a miniature microbial fuel cell (µMFC) and a miniature photosynthetic electrochemical cell (µPEC). A bulk micromachining process is used to fabricate the fuel cells, and the prototype has an active proton exchange membrane area of 1 cm 2. Two different microorganisms are used as biocatalysts in the anode: (1)(More)
Polymeric microneedles fabricated by micro-injection molding techniques have been demonstrated using Topas Ò COC as the molding plastic material. Open-channel microneedles with cross-sectional area of 100 lm · 100 lm were designed and fabricated on top of a shank of 4.7 mm in length, 0.6 mm in width, and 0.5 mm in depth. The tip of the microneedle has a(More)