Learn More
A near-field electrospinning (NFES) process has been developed to deposit solid nanofibers in a direct, continuous, and controllable manner. A tungsten electrode with tip diameter of 25 microm is used to construct nanofibers of 50-500 nm line width on silicon-based collectors while the liquid polymer solution is supplied in a manner analogous to that of a(More)
Polymeric microneedles fabricated by micro-injection molding techniques have been demonstrated using Topas Ò COC as the molding plastic material. Open-channel microneedles with cross-sectional area of 100 lm · 100 lm were designed and fabricated on top of a shank of 4.7 mm in length, 0.6 mm in width, and 0.5 mm in depth. The tip of the microneedle has a(More)
—A combination of surface-and bulk-micromachining techniques is used to demonstrate the feasibility of fabricating microhypodermic needles. These microneedles, which may be built with on-board fluid pumps, have potential applications in the chemical and biomedical fields for localized chemical analysis, programmable drug-delivery systems, and very small,(More)
—Silicon fusion and eutectic bonding processes based on the technique of localized heating have been successfully demonstrated. Phosphorus-doped polysilicon and gold films are applied separately in the silicon-to-glass fusion bonding and silicon-to-gold eutectic bonding experiments. These films are patterned as line-shape resistive heaters with widths of 5(More)
A method of active frequency tuning on comb-shape micro resonators has been successfully demonstrated by means of localized stressing effects. A mechanical beam structure that can be resistively heated to generate thermal stress, is integrated as part of the comb-shape micro resonator for frequency tuning. Experimentally, a frequency change up to 6.5% is(More)