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Journals and Conferences
TiO films were prepared by custom-made Cathode Multi Arc Ion equipment. Experimental test results reveal that our equipment can easly deposite big area scale TIO, particle size is in nanometer scale .
TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography, microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and… (More)