Linghui Wu

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The dynamic characteristics of an accelerometer’s shell is analyzed. To avoid resonance and subsequent failure, the shell’s natural frequencies and harmonic response are important considerations in structure optimization, for they significantly influence the performance of the sensors. The finite element analysis software ANSYS was applied(More)
Traditional rule-based and model-based Optical Proximity Correction (OPC) and rule-based Resolution Enhancement Technology (RET) methods have been the workhorse mask synthesis methods in volume production for logic and memory devices for more than 15 years. With continuous technical enhancements, these methods have proven themselves robust, flexible and(More)
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