Leonardo Baldasarre

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This paper deals with the problem of accurate evaluation of global quantities related to the electrostatic fields in micro-electro-mechanical systems (MEMS). In particular, the capacitance and the electrostatic force play often an important role in the design of micro-machines. In spite of the fact that some simplified formulas have been proposed so far, in(More)
The goal of this research is to measure the adhesion energy in experimental devices which are as alike as possible to real-life MEMS and to provide a sound basis for numerical methods which could predict the adhesion energy in various situations. In this way, a better knowledge of adhesion properties is obtained, possibly entailing deeper miniaturization(More)
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