Lars Schellhase

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Based on a power high-voltage (HV) HBT technology the successful down scaling towards low-power devices for mixed signal integrated circuits is described. Stress effects and mechanical stability issues required processing adaptations. High yields of 99.8 % for 3x30 μm 2 and 99.0% for 2x10 μm 2 HV-HBTs were achieved. This allows for fabrication of complex(More)
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