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This research is motivated by a scheduling problem found in the di6usion and oxidation areas of semiconductor wafer fabrication, where the machines can be modeled as parallel batch processors. We attempt to minimize total weighted tardiness on parallel batch machines with incompatible job families and unequal ready times of the jobs. Given that the problem(More)
In this paper, we present results on designing the architecture of an agent-based system for production control of semiconductor wafer fabrication facilities (wafer fabs). These manufacturing systems are characterized by reentrant product flows, sequence dependant setup-times, inhomogenous parallel machines, a diverse product mix, a mix of different process(More)
In this paper, we consider flow shop scheduling problems for jobs with time constraints between consecutive process steps. We start by analyzing different types of time constraints that arise in semiconductor wafer fabrication facilities. A simple heuristic that sequentially schedules the jobs in a list scheduling manner is proposed. Moreover, a(More)
This research is motivated by a scheduling problem found in the diffusion and oxidation areas of semiconductor wafer fabrication facilities. With respect to some practical motivated process constraints, like equipment dedication and unequal batch-sizes, we model the problem as unrelated parallel batch machines problem with incompatible job families and(More)
The authors discuss the concept and design criteria for a framework that facilitates the performance assessment of shop-floor control systems. Their basic concept includes a simulation model that emulates the shop floor of a wafer fab, sends information to the control system, and receives information back from the control system. The shop-floor control(More)