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Fracture toughness, hardness and elastic modulus of hydrogenated amorphous carbon films deposited by chemical vapor deposition
- M. D. Michel, L. V. Muhlen, C. Achete, C. M. Lepienski
- Materials Science
- 21 February 2006
Abstract Fracture toughness, hardness and elastic modulus of hydrogenated amorphous carbon thin films produced from butene gas deposited by chemical vapor deposition on silicon were measured by depth… Expand