A new type of resonance cavity enhanced (RCE) photodetector is being proposed. The cavity in this structure includes a grating with nearly perfect retro-reflection as a front mirror and conventional multilayer structure as the back mirror.
Tunable infrared sensors fabricated by surface micromachining with a maximum thermal budget of 2 hours at 125degC have been realized, demonstrating that a generic, robust, environmentally stable MEMS process is possible using maximum process temperatures <200degC
This study investigated the techniques for determining the elastic modulus and estimating the stress gradient of plasma-enhanced chemical vapor deposition (PECVD) silicon nitride thin films. The experimentally determined elastic modulus was then used in a finite element beam model to compute the stress distribution inside the thin films using a commercial… (More)
In this paper we study the influence of carrier transport under non-equilibrium condition in HgCdTe superlattice barrier detector employing self-consistent NEGF-Poisson solver. We use single-band effective mass approximation extracted from k.p envelope function to calculate dark current in the presence of applied bias. We expect the properties of… (More)
We present preliminary findings regarding an optical cross-bar switch concept based on integrated silicon photonics waveguides and a MEMS device. Finite difference time domain simulations were performed were performed at a wavelength of 1550 nm to validate the initial design. Simulations indicate that there is a 9 dB difference in output optical power that… (More)
While optical spectral analysis has shown great promise in industrial and agricultural applications, the cost, size, and fragility of spectrometer instruments have hindered widespread application of the technology. MEMS microspectrometers offer great hope for low-cost, light-weight, robust, spectrometers, paving the way for pervasive use of infrared… (More)
A MEMS-based Fabry-Perot etalon that uses doubly-supported beams for actuation is shown to have a wider tuning range than conventional designs using parallel plates