Kyohei Hyashi

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A two-wavelength interferometer (TWI) based on a sinusoidal-phase-modulation method with an acetylene stabilized laser and a second harmonic generation (SHG) was developed. The periodic non-linearity error for the TWI was estimated to be ± 0.1 µm at a dead path of 0.32 m. A long-term measurement showed that the TWI stability was ± 3 × 10(-7) at a dead path(More)
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