Kwang-Ho Kwon

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We fabricated dual-beam cantilevers on the microelectromechanical system (MEMS) scale with an integrated Si proof mass. A Pb(Zr,Ti)O3 (PZT) cantilever was designed as a mechanical vibration(More)
In this study, a neural network model for silicon nitride (SiN) deposition process is proposed. SiN thin films were deposited by a direct inner two parallel inductively coupled plasma chemical vapor(More)
For investigating silicon nitride (SiN) thin film deposition process at room temperature without additional substrate heating, we studied inductively coupled plasma chemical vapor deposition with two(More)