Kurt W. Berger

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Projection imaging of 0.1-microm lines and spaces is demonstrated with a Mo/Si multilayer coated Schwarzschild objective and 14-nm illumination from a laser plasma source. This structure has been etched into a silicon wafer by using a trilevel resist and reactive ion etching. Low-contrast modulation at 0.05-microm lines and spaces is observed in(More)
The test-retest reliability of Most Comfortable Loudness Level (MCL) was examined in three experiments using young normal-hearing adults unsophisticated in audiometric testing. Test stimuli included pure tones, narrow-band noise, and damped wave trains, with presentation by ascending, descending, and Bekesy procedures. Intersubject reliability was found to(More)
Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment(More)
Most Comfortable Loudness (MCL) was determined for each of 10 normal-hearing young adults using pulsed pure-tone trains and damped wave trains (DWTs) each at 2.5/sec, at frequencies of .25 and 2 kc/s; 4 MCLs were determined for each of the 4 signal type/frequency combinations. In a bracketing procedure employing steps of 20, 10, and finally 5 db, Ss were(More)
During the fiscal years 92-94 a joint group from Sandia/New Mexico and Sandia/California studied the development of new laser-plasma targets for projection x-ray or EUV (extreme ultraviolet) lithography. Our experimental and theoretical analyses incorporated target design as an integral part of the lithographic optical system. Targets studied included thick(More)
Nine hearing threshold patterns and uncomfortable loudness level combinations were used in comparing three hearing aid prescriptive procedures by means of a modified Articulation Index. In a minority of the comparisons a small dynamic range required a reduction from the gain that would have been prescribed. For these cases reducing the real-ear gain, in(More)