Krassimir H. Denishev

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Piezoelectric films of poly(vinylidene fluoride) (PVDF) were prepared by casting and spin coating on silicon and glass substrates. The effect of the drying temperature and the post-annealing temperature on the film morphology was studied with optical microscopy. It was chosen the optimal combination of deposition conditions, regarding the wetting of the(More)
– The electromagnetic force that is most commonly used in microactuators is not the only driving force. A MEMS variable capacitor could be driven by vertical thermal actuators. Thermal actuators can generate relatively large force and displacement at low actuating voltage. The MEMS capacitor is created by using surface micromachining. The power consumption(More)
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