Kotaro Nagoshi

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A through hole with a diameter less than 100 nm was fabricated in an Ag foil using only a focused ion beam (FIB) system and in situ measurements of the penetrating ion beam. During the drilling of the foil by a FIB of Ga(+) ions, the transmitted part of the beam was measured with an electrode mounted on the back face of the foil. When the beam current(More)
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