Koosuke Fujimoto

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We demonstrate very high-density ferroelectric probe storage experiments of 1 Tbit/inch2 in polycrystalline Pb(Zr, Ti)O3 (PZT) thin film for the first time. Very thin polycrystalline PZT film with the thickness of 40 nm was successfully deposited on silicon substrate with SrRuO3 (SRO) electrode using liquid delivery metal-organic chemical vapor deposition(More)
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