Kishore Potti

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Finding hidden capacity and maximizing cluster tool throughput is a common goal for today's semiconductor manufacturers. This presentation will discuss a flexible and accurate simulation program capable of modeling a wide range of semiconductor process tools. The simulation program provides visibility and understanding into the internal dependencies and(More)
The authors define 4 levels of complexity in simulation modeling. The ability of the models to predict bottlenecks in the fab. Capability of the model to be used for strategic applications such as cycle time reduction. Simulate complex dispatch rules using the model, Capability of the model to predict operational output of the wafer fab that is clean room(More)
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