Keya Sanyal

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
Learn More
In this paper design of a two-axis capacitive accelerometer is described. Variation of capacitance of the device with applied acceleration as well as sensitivity of the device is analyzed. The performance analysis of the device is done using ANSYS Multyphysics software. From the analysis results, a capacitive mems accelerometer with enhanced sensitivity has(More)
A MEMS Capacitive Accelerometer which have symmetrical beam-mass structure with different interconnection has been described in this paper. Design of a H-shaped beam capacitive accelerometer is described using finite element analysis software. Output voltage is calculated with respect to the given accelerations as well as sensitivity of the device is(More)
  • 1