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Method of robust pattern design for lens aberration
Recently, the critical dimension (CD) abnormality due to lens aberrations of exposure tool has become one of the critical issues in production of semiconductor devices. The most remarkable feature ofExpand
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Analysis on the effects of high frequency body vibrations for vehicle maneuver feeling
Influence of body stiffness on vehicle maneuverability and handling characteristics has been open problem for decades. This paper focuses on the influence of the high frequency body vibration onExpand
Aberration Monitoring toward Wavefront Matching with Device Patterns
Wavefront matching is a new technique for compensating uncontrollable aberration effects on a certain reticle design which involves moving controllable aberrations. Such a compensation concept isExpand
Evaluations of road information and stiffness feeling by mean of the steering vibration
This paper examined the relations of steering vibration and the road information by using a steering simulator. Expand