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When the short displacement of a piezoelectric element in a compliant stage with simple flexures is amplified for large motion range by an amplification mechanism, a large displacement causes an excessive stress in a simple flexure. Moreover the excessive stress has the possibility of a yielding failure. A cartwheel flexure hinge offers the compliant stage(More)
This paper describes one approach to build a nano order precision robot manipulator stage. We propose conceptual design of 6 dof manipulator structure, 3 dof in plane motion and 3 dof out plane motion. Especially, in plane motion, we proposed a 3-PPR planar parallel manipulator, which consists of three active prismatic joints, three passive prismatic(More)
This paper presents the design and analysis of a miniaturized nano-motion stage which is driven by piezo stacks. The piezo-driven stage manufactured by the conventional machining is limited to decrease its size due to the size of conventional piezo stack and the characteristics of the machining. In this paper, the proposed stage consists of three layers to(More)
This paper describes a tentative results obtained on the way of developing the nano order precision robot that works with the resolution of 10nm or less. For precision positioning of robot manipulator, we adopt the flexure hinge mechanism composed with notches and holes that allows high stiffness and easy applications to construct the parallel manipulator.(More)
This paper describes a tentative result on the way of developing nano-order precision robot to handle micro objects with under 10 nm resolution of positioning. For mechanism, we established the nano order precision robot manipulator stage with the workspace range to be 100 mum times 100 mum times 100 mum, and we proposed a conceptual design of 6 dof(More)
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