Kazushi Hayashi

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SUMMARY We have investigated the microwave-detected photocon-ductivity responses from the amorphous In–Ga–Zn–O (a-IGZO) thin films. The time constant extracted by the slope of the slow part of the reflectivity signals are correlated with TFT performances. We have evaluated the influences of the sputtering conditions on the quality of a-IGZO thin film, as(More)
SUMMARY Microwave photoconductivity decay (μ-PCD) method was applied to evaluate the effects of chemical composition and Ar + plasma induced damage on the bulk and the surface states in amorphous In-Ga-Zn-O (a-IGZO) films. It was found that the peak reflectivity signal in the pho-toconductivity response increased with decreasing the Ga content, and had a(More)
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