Katsuichi Kitagawa

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A new surface profiling algorithm called the local model fitting (LMF) method is proposed. LMF is a single-shot method that employs only a single image, so it is fast and robust against vibration. LMF does not require a conventional assumption of smoothness of the target surface in a band-limit sense, but we instead assume that the target surface is locally(More)
The local model fitting (LMF) method is one of the useful single-shot surface profiling algorithms. The measurement principle of the LMF method relies on the assumption that the target surface is locally flat. Based on this assumption, the height of the surface at each pixel is estimated from pixel values in its vicinity. Therefore, we can estimate flat(More)
The local model fitting (LMF) method is a useful single-shot surface profiling algorithm based on spatial carrier frequency fringe patterns. The measurement principle of the LMF method relies on the assumption that the target surface is locally flat. In this paper, we first analyze the measurement error of the LMF method caused by violation of the locally(More)
The local model fitting (LMF) method is a useful single-shot surface profiling algorithm that features fast measurement speed and robustness against vibration. However, the measurement range of the LMF method (i.e., measurable height difference between two neighboring pixels) is limited up to a quarter of the light source wavelength. To cope with this(More)
The local model fitting (LMF) method is a single-shot interferometric surface profiling algorithm that possesses non-destructive, fast, accurate, and robust measurement capabilities. To extend the measurement range of LMF, extensions based on multiwavelength light sources such as the multiwavelength-matched LMF (MM-LMF) method and the(More)
The local model fitting (LMF) method is a single-shot surface profiling algorithm. Its measurement principle is based on the assumption that the target surface to be profiled is locally flat, which enables us to utilize the information brought by nearby pixels in the single interference image for robust LMF. Given that the shape and size of the local area(More)
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