Karen W. Markus

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Design, microfabrication, and integration of a micromachined spatial light modulator (pSLM) device are described. A large array of electrostatically actuated, piston-motion MEMS mirror segments make up the optical surface of the tSLM. Each mirror segment is capable of altering the phase of reflected light by up to one wavelength for infrared illumination (X(More)
OBJECTIVE We previously reported elevated serum levels of the cytokines interleukin-6 (IL-6) and transforming growth factor-beta (TGF-beta) in patients with anorexia nervosa (AN). We investigated the cellular production of these two cytokines and of interferon-gamma (IFN-gamma), interleukin-1alpha (IL-1alpha), and tumor necrosis factor-alpha (TNF-alpha) in(More)
n the past few years, the field of micro-electromechanical systems (MEMS) industry has exceeded I the $1-billion-a-year mark. Some economic forecasters estimate that the industry will surpass $14 billion by the year 2000.1 The reason for this tremendous growth is the enabling nature of MEMS, which give engineers and researchers the tools to build things(More)
This paper presents a high speed, high resolution phase-only microelectromechanical system (MEMS) spatial light modulator (SLM), integrated with driver electronics, using through-wafer vias and solder bump bonding. It employs a polysilicon thin film MEMS technology that is well-suited to micromirror array fabrication and offers significant improvement in(More)
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