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We demonstrate a monolithic photonic integration platform that leverages the existing state-of-the-art CMOS foundry infrastructure. In our approach, proven XeF 2 post-processing technology and compliance with electronic foundry process flows eliminate the need for specialized substrates or wafer bonding. This approach enables intimate integration of large(More)
Most demonstrations in silicon photonics are done with single devices that are targeted for use in future systems. One of the costs of operating multiple devices concurrently on a chip in a system application is the power needed to properly space resonant device frequencies on a system's frequency grid. We asses this power requirement by quantifying the(More)
We present a compact 1.3 x 4 µm 2 Germanium waveguide photodiode, integrated in a CMOS compatible silicon photonics process flow. This photodiode has a best-in-class 3 dB cutoff frequency of 45 GHz, responsivity of 0.8 A/W and dark current of 3 nA. The low intrinsic capacitance of this device may enable the elimination of transimpedance amplifiers in future(More)
Silicon photonics is a promising technology to scale offchip bandwidth in a power-efficient manner. Given equivalent bandwidth, the flexibility of switched networks often leads to the assumption that they deliver greater performance than point-to-point networks on message passing applications with low-radix traffic patterns. However, when optical losses are(More)
We show GHz modulation in a 2.5 µm radius silicon micro-ring, with only 150 mV peak-peak drive voltage and an electro-optic modal volume of only 2 µm 3. The swing voltage and the micro-ring modulator are the smallest demonstrations so-far in silicon. The presented approach lays the ground work for a new class of high speed low voltage modulators enabling,(More)
We report 50 Gbit/s modulation capability using four silicon micro ring modulators within a footprint of 500 µm 2. This is the highest total modulation capability shown in silicon using compact micro-ring modulators. Using the proposed techniques, silicon nanophotonic bandwidths can meet the requirements of future CMOS interconnects by using multiple(More)
  • David A B Miller, D A B Miller, K.-H Koo, P Kapur, K C Saraswat, F Y Gardes +145 others
  • 2012
We analyze energy consumption in optical modulators operated in depletion and intended for low-power interconnect applications. We include dynamic dissipation from charging modulator capacitance and net energy consumption from absorption and photocurrent, both in reverse and small forward bias. We show that dynamic dissipation can be independent of static(More)
We report error-free long-haul transmission of optical data modulated using a silicon microring resonator electro-optic modulator with modulation rates up to 12.5 Gb/s. Using bit-error-rate and power penalty characterizations, we evaluate the performance of this device with varying modulation rates, and perform a comparative analysis using a commercial(More)