• Publications
  • Influence

Claim Your Author Page
Ensure your research is discoverable on Semantic Scholar. Claiming your author page allows you to personalize the information displayed and manage publications (all current information on this profile has been aggregated automatically from publisher and metadata sources).
  • László Szikszai, Philipp Jaschinsky, +9 authors Arie J. den Boef
  • Physics, Engineering
  • Advanced Lithography
  • 2009 (First Publication: 13 March 2009)
  • Electron beam direct write (EBDW) can be utilized for developing metrology methods for future technology nodes. Due to its advantage of high resolution and flexibility combined with suitableContinue Reading
  • Manuela Gutsch, Kang-Hoon Choi, +5 authors Thomas Werner
  • Materials Science, Engineering
  • European Mask and Lithography Conference
  • 2014 (First Publication: 17 October 2014)
  • Many efforts were spent in the development of EUV technologies, but from a customer point of view EUV is still behind expectations. In parallel since years maskless lithography is included in theContinue Reading