Kalin V. Lazarov

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This paper describes the development of a miniature assembly cell for micro-electromechanical systems (MEMS). Potential applications of the developed assembly cell are assembly of miniature optical systems, integration of optoelectronics, such as laser diodes with CMOS, and epitaxial lift-off (ELO) of thin films used in optoelectronic devices. The cell(More)
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