Kaito Arai

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Buckling behavior of silicon-micro machined diaphragm structures was investigated for highly sensitive structures of piezoelectric ultrasonic microsensors from the viewpoint of intrinsic stress of sol-gel derived lead-zirconate-titanate (PZT) films. Since upward buckled diaphragm structures yield higher sensitivity than flat or downward ones, intrinsic PZT(More)
Piezoelectric diaphragm-type ultrasonic microsensors were fabricated and their vibration modes were investigated from the viewpoint of sensitivity affected by the distribution of piezoelectrically induced polarization. Three kinds of diaphragms were fabricated with the geometries of square-flat, square-buckled and circular-buckled, to clarify the effect of(More)
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