Kai Neumann

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Biju Kumar1
Christel Renders1
Wilco Keur1
Linda van Leuken-Peters1
1Biju Kumar
1Christel Renders
1Wilco Keur
1Linda van Leuken-Peters
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Thin-film ferroelectric capacitors have been integrated with resistors and active functions such as ESD protection into small, miniaturized modules, which enable a board space saving of up to 80%. With the optimum materials and processes, integrated capacitors with capacitance densities of up to 100 nF/mm2 for stacked capacitors combined with breakdown(More)
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