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System Integration using 3D technology is a very promising way to cope with current and future requirements for electronic systems. Since the pure shrinking of devices (known as “More Moore”) will come to an end due to physical and economic restrictions, the integration of systems (e.g. by stacking dies, or by adding sensor functions) shows a(More)
Microsystem design includes different domains (e.g. microelectronics, micro mechanics, etc.) and is characterized by multidisciplinarity. Growing demands and complexity result in new challenges for computer-aided microsystem design. Developments from SMEs (small and medium sized enterprises) are often heterogeneous modular-based microsystems associated with(More)
Developing 3D systems is a highly complex procedure. Next to a huge variation of possibilities on how to vertically integrate two or more dies, a lot of aspects regarding cost, design and application specific selection of technology have to be considered. Therefore a design model, considering the mutual influence of design and process technology during the(More)
Product engineering for microsystems or MEMS (micro-electromechanical system) devices comprises the design of the structure as well as the definition of its manufacturing process flow. The approach is characterized by application specific fabrication flows, i.e. fabrication processes (built up by a large variety of process steps and materials) depending on(More)
This paper investigates the practices for developing manufacturing processes in the high tech industries and specifically in the field of semiconductor thin film process technologies. For this purpose the current development practices are described, issues arising from the current practices are extracted and ways to approach these issues are highlighted.(More)
This demo presents a proof of concept of a meta-verification tool for the tool-independent definition and verification of constraints within the analog design flow. The automatic consideration and verification of design constraints becomes increasingly important due to their continuous growth in number and complexity. With the Constraint Engineering System(More)
The entire verification of simple and complex constraints is crucial to the development of highly reliable microelectronic systems as they are demanded by the zero defect policy in the automobile industry. The increasing requirements on electronic components and the rapid technological progress necessitate the compliance with all specified functional and(More)
Today's MEMS-design is frequently supported by EDA-frameworks made for micro electronic circuits or derived from microelectronics frameworks. These frameworks usually do not completely meet the requirements of MEMS design. This is due to the fact that they are optimized to manage huge amounts of devices from a very limited set of device types (management of(More)