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Developing 3D systems is a highly complex procedure. Next to a huge variation of possibilities on how to vertically integrate two or more dies, a lot of aspects regarding cost, design and application specific selection of technology have to be considered. Therefore a design model, considering the mutual influence of design and process technology during the(More)
The micro electromechanical systems (MEMS) industry is characterized by small and medium sized enterprises (SMEs) specialized on products to solve problems in specific domains like medicine, automotive sensor technology, etc. In this field of business the technology driven design approach known from micro electronics is not appropriate. Instead each design(More)
This paper investigates the practices for developing manufacturing processes in the high tech industries and specifically in the field of semiconductor thin film process technologies. For this purpose the current development practices are described, issues arising from the current practices are extracted and ways to approach these issues are highlighted.(More)
System Integration using 3D technology is a very promising way to cope with current and future requirements for electronic systems. Since the pure shrinking of devices (known as “More Moore”) will come to an end due to physical and economic restrictions, the integration of systems (e.g. by stacking dies, or by adding sensor functions) shows a(More)
The entire verification of simple and complex constraints is crucial to the development of highly reliable microelectronic systems as they are demanded by the zero defect policy in the automobile industry. The increasing requirements on electronic components and the rapid technological progress necessitate the compliance with all specified functional and(More)
Product engineering for microsystems or MEMS (micro-electromechanical system) devices comprises the design of the structure as well as the definition of its manufacturing process flow. The approach is characterized by application specific fabrication flows, i.e. fabrication processes (built up by a large variety of process steps and materials) depending on(More)
Today's MEMS-design is frequently supported by EDA-frameworks made for micro electronic circuits or derived from microelectronics frameworks. These frameworks usually do not completely meet the requirements of MEMS design. This is due to the fact that they are optimized to manage huge amounts of devices from a very limited set of device types (management of(More)