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- T. Satoh, K.. Hinode, Hiroto Akaike, S.. Nagasawa, Y. Kitagawa, M. Hidaka
- IEEE Transactions on Applied Superconductivity
- 2005

To improve the operating speed and density of Nb single-flux-quantum integrated circuits, we developed an advanced fabrication process based on NEC's standard process. We fabricated planarizedâ€¦ (More)

- T. Satoh, K.. Hinode, +7 authors N. Takagi
- IEEE Transactions on Applied Superconductivity
- 2009

We have developed an advanced process for fabricating a next-generation multi-layer Nb integrated circuit structure incorporating a top active layer. In this structure, the passive-transmission-lineâ€¦ (More)

- T. Oshima, K.. Hinode, +15 authors T Iwasaki
- Digest. International Electron Devices Meeting,
- 2002

Studied stress-induced voiding in Cu interconnects in the temperature range below 250/spl deg/C, and found two different voiding modes. One mode occurs inside a via having wide wire above it, and canâ€¦ (More)

- S.. Nagasawa, T. Satoh, K.. Hinode, Y. Kitagawa, M. Hidaka
- IEEE Transactions on Applied Superconductivity
- 2007

To achieve larger scale and higher speed single flux quantum (SFQ) circuits, we have been developing a 10-kA/cm<sup>2</sup> Nb multi-layer fabrication process composed of more than six pla- narizedâ€¦ (More)

- T. Satoh, K.. Hinode, S.. Nagasawa, Y. Kitagawa, M. Hidaka
- IEEE Transactions on Applied Superconductivity
- 2007

We have developed an advanced fabrication process for fabricating Nb integrated circuits with up to nine planarized Nb layers, and with critical current density of Josephson junctions of 10â€¦ (More)

- M. Hidaka, S.. Nagasawa, K.. Hinode, T. Satoh
- IEEE Transactions on Applied Superconductivity
- 2013

We are investigating device yield in our Nb-nine-layer fabrication process for single-flux-quantum (SFQ) circuits, in which the critical current density of the Nb/AlO<sub>x</sub>/ Nb Josephsonâ€¦ (More)

- C.. Urano, M. Maruyama, +8 authors N.. Kaneko
- CPEM 2010
- 2010

A new implementation of Sullivan-Dziuba type cryogenic current comparators (CCCs) is proposed. We designed an integrated CCC device consisting of a thin-film CCC, a pick-up coil and a SQUID sensor onâ€¦ (More)

- K.. Hinode, T. Satoh, S.. Nagasawa, M. Hidaka
- IEEE Transactions on Applied Superconductivity
- 2009

Josephson junctions with niobium electrodes connected with palladium, which is employed in the bump metallization, have about 20% larger critical current density than those with electrodes notâ€¦ (More)

- Hiroto Akaike, K Shigehara, +4 authors M. Hidaka
- IEEE Transactions on Applied Superconductivity
- 2009

We have evaluated the effects of a DC power (DCP) layer in a 10-Nb-layer device using SQUIDs and large-scale Josephson transmission lines (LS-JTLs). The 10-Nb-layer device has recently been developedâ€¦ (More)

- K.. Hinode, Naoki Owada, Tohru Terada, S. Iwata
- IEEE Transactions on Electron Devices
- 1987

The mechanism of Si take-up by aluminum conductor films layered with one of four refractory metals (Ti, Ta, Mo, or W) was studied. It was found that silicidation of refractory metal layers proceededâ€¦ (More)