• Publications
  • Influence
Semiconductor yield improvement: results and best practices
The results of a world-wide study on yield improvement are presented. Die yields collected from 21 fabs are transformed via a logit formula and compared. The die yields and die yield improvement
Integration of surface-micromachined zinc oxide sensors in n-well CMOS technology
Integrated sensors based on zinc oxide thin-film sensor technology have been fabricated in a 2- mu m n-well CMOS process. Diagnostic surface-microsensor structures for detecting temperature change
Financial Analysis of a Successful Multi-User Academic Laboratory
  • K. Voros
  • Engineering
    19th Biennial University/Government/Industry…
  • 9 July 2012
Maintaining a working university laboratory with capability to build any kind of electronic devices is a major effort and commitment on the part of the faculty. The only way we could manage is by
Evolution of the Microfabrication Facility at Berkeley
The Berkeley Microfabrication Facility has been in operation since 1962. It is a shared facility that supports a wide variety of experimental research in microelectronics and other fields. Currently,
Building the New Berkeley Microlab
The University of California at Berkeley is proceeding with construction of a new nanofabrication laboratory - the CITRIS Nanolab. This new facility is a key component of the College of Engineering's
Hop on board with safety
  • K. Voros
  • Computer Science
    Proceedings of the Fourteenth Biennial University…
  • 20 June 2001
A 20 min. safety video, Hop on Board: Safety and Chemical Hygiene in the Microlab, is the result of efforts to maintain a culture among lab users to encourage one another to be safe.
The UC Berkeley IC Lab
  • K. Voros
  • Engineering
    IEEE Solid-State Circuits Magazine
  • 23 June 2014
Education and research in microelectronics, including fabrication and demonstrations of novel devices and circuits, began at Berkeley in 1961. Many creative accomplishments moved Berkeley to national
Berkeley Micro/NanoLab Affiliate Members Program: A Critical Component of Laboratory Growth and Stability
In fiscal year 1995, the Berkeley Microlab formalized access to the university laboratory cleanroom and use of the lab's micro/nano-fabrication academic research equipment by industrial researchers.
A 10:1 Photomask Reduction Camera
To make high quality reticles for 1:1 projection steppers a new 10:1 reduction camera had been designed and built. Components of the camera, the illuminator and controller are described and operating