K. K. M. B. Dilusha Silva

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Inductively coupled plasma enhanced chemical vapor deposited (ICPCVD) a-Si is used as a structural material in many microelectromechanical systems (MEMS). For a-Si to function as a sound structural component, the material must display long term mechanical stability. This paper evaluates the Young's modulus, hardness, and residual stress of a-Si under(More)
This letter presents the design, fabrication, and optical characterization of silicon-air-silicon-based surface micro-machined distributed Bragg reflectors (DBRs) for the visible to near infrared wavelength range (540-960 nm). The DBR (mirror) consisted of two quarter wave thick silicon films separated by a quarter-wave air gap. A mirror array was(More)
This paper reports on the successful demonstration of Ge/ZnS-based Fabry-Perot filters operating in the longwave infrared (LWIR). The suitability of thermally deposited Ge and ZnS as thin-film mirror materials for micromachined LWIR Fabry-Perot filters has been fully investigated, and it is shown that a film growth temperature higher than 150 °C is(More)
This paper reports on a proof-of-concept microelectromechanical system-based Fabry-Perot filter that is capable of electrically tuning within the long-wave infrared thermal imaging band of 8-12 μm. The device employs a single-layer quarter-wavelength thick tensile germanium membrane for the suspended top mirror in order to achieve nanometer-scale(More)
In this paper, we present the optimization of optical and mechanical properties of inductively coupled plasma chemical vapor deposited (ICPCVD) amorphous silicon thin films for fabrication of high-quality optical microelectromechanical systems-based devices operating from visible to short-wave infrared wavelengths (450-3000 nm). Our results indicate that,(More)
We present the design, fabrication, and optical and mechanical characterization of silicon-/silicon-oxide-based optical filters and distributed Bragg reflectors in sizes ranging from 500 μm × 500 μm to 5 mm × 5 mm. They are designed to be used in conjunction with either single-element photodetectors or large-area focal plane(More)
Photostriction-based all-optical actuation of silicon microcantilevers has been investigated through experimental characterization of structures fabricated on silicon-on-insulator substrates, and through numerical modeling and analysis of their semiconductor device and micromechanical characteristics. Since the pressure coefficient of the bandgap is(More)
Particularly in rural settings, laser based free-space communications channels hold promise to provide the last-mile link for a multitude of applications, including delivery of high-speed internet to the home. Work by Grant et al [1], have demonstrated that scintillation noise is an important factor in optical atmospheric transmission systems, which serves(More)
This paper presents the results of experimental work on a low temperature through-wafer reactive ion etching (RIE) technique obtained in the course of development of a process that can be used in small sample processing for microelectromechanical systems (MEMS). Low temperature RIE are a crucial step for many dry MEMS fabrication processes, where can be(More)
We present the design, fabrication, and optical characterization of silicon-air-silicon-based distributed Bragg reflectors, or quarter wavelength mirrors, in sizes ranging from 200 μm × 200 μm to 5 mm × 5 mm. Such mirrors can be used in conjunction with either single-element photodetectors or large-area focal plane arrays to(More)