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1996 ii The thesis of Brett Alan Warneke is approved. Figure 3-7 Cross-sectional diagram of an aluminum trace running between oxide plates and contacting a polysilicon piezoresistor. The oxide and first metal overetch into the silicon substrate causes the trace Figure 3-8 SEM of a Skeleton Crew accelerometer with bond wires providing 9.6 µgm of additional(More)
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