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Low power wireless sensor networks provide a new monitoring and control capability for civil and military applications in transportation, manufacturing, biomedical, environmental management, and safety and security systems. Wireless microsensor network nodes, operating at average and peak power levels constrained by compact power sources, offer a range of(More)
Distributed MEMS networks can revolutionize critical military, industrial, and civil surveillance, transportation, manufacturing, and environmental management systems. Low cost sensor network development, coupled with the high performance of compact computing systems can provide new monitoring and control capability. Embedded microsensors and microactuators(More)
Low power wireless sensor networks provide a new monitoring and control capability for civil and military applications in transportation, manufacturing, biomedical, environmental management, and safety and security systems. Wireless microsensor network nodes, operating at average and peak power levels constrained by compact power sources, offer a range of(More)
1996 ii The thesis of Brett Alan Warneke is approved. Figure 3-7 Cross-sectional diagram of an aluminum trace running between oxide plates and contacting a polysilicon piezoresistor. The oxide and first metal overetch into the silicon substrate causes the trace Figure 3-8 SEM of a Skeleton Crew accelerometer with bond wires providing 9.6 µgm of additional(More)
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