Jyh-Cheng Jeng

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Modern industrial plants are usually large scaled and contain a great amount of sensors. Sensor fault diagnosis is crucial and necessary to process safety and optimal operation. This paper proposes a systematic approach to detect, isolate and identify multiple sensor faults for multivariate dynamic systems. The current work first defines deviation vectors(More)
There are many possible factors in semiconductor manufacturing processes such as metrology tool bias, product type, or chamber that may induce disturbance to the process output. To account for all these types, a context-based model is often used. The most important feature of a context-based system is rank deficiency, and therefore we propose a method that(More)
In this paper, a systematic procedure is proposed for the generalized design of decoupling multivariable controller, which may result in a complete decoupling, partial decoupling or no decoupling, to achieve a better disturbance rejection response. Before the decoupling, a relative load gain (abbr. RLG) is defined to determine which control loops need to be(More)
A systematic procedure for performance assessment and PI/PID controller design based on modified relay feedback test is proposed in this paper. It can estimate the gain and phase margins of unknown systems on-line to indicate the appropriateness of the controller parameters. When the retuning of controller is found necessary, the proposed modified relay(More)
A model-based autotuning system is presented for PI/PID controllers. A conventional relay feedback test is used to generate the response for estimations of parameters such as: process gain, ultimate gain, ultimate frequency, and apparent deadtime. Two ANNs are built based on the data generated from standard SOPDT processes to enhance the estimation of(More)
A two-step design t o control integrator processes in an SISO or MIMO system is proposed. For an SISO system, the first step of the design is to stabilize the integrator process with P&D modes in a secondary loop to achieve good stability robustness and modest performance. In the second step of design, a P&I controller in the primary loop is derived to(More)