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Journals and Conferences
Recently, alternations of zirconia ceramic femoral heads of total hip prostheses during in vivo conditions have caused concern in the medical disciplines regarding phase transformation of zirconia… (More)
Nikon has been developing electron projection lithography (EPL), which is eminently suitable for 65nm node technologies and beyond. The electron optics (EO) sub-system, which has been collaborated… (More)
In this paper, the resist simulation and the experimental performance of EB stepper focused on application to contact hole layer are described.