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We present a hybrid nanoelectromechanical (NEM)/CMOS static random access memory (SRAM) cell, in which the two pull-down transistors of a conventional CMOS six transistor (6T) SRAM cell are replaced with NEM relays. This SRAM cell utilizes the infinite subthreshold slope and hysteretic properties of NEM relays to dramatically increase the cell stability(More)
RF performance of surface micromachined solenoid on-chip inductors fabricated on a standard silicon substrate (10 cm) has been investigated and the results are compared with the same inductors on glass. The solenoid inductor on Si with a 15m thick insulating layer achieves peak quality (Q ) factor of 16.7 at 2.4 GHz with inductance of 2.67 nH. This peak(More)
We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality ( ) factors. Fully integrated(More)
Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14nH, a peak Q of 38 at 1.8GHz with area occupation of 500μm by 500μm excluding pads (56nH/mm) from a stacked spiral inductor on a glass substrate. Also,(More)
Nanoelectromechanical (NEM) switches have received widespread attention as promising candidates in the drive to surmount the physical limitations currently faced by complementary metal oxide semiconductor technology. The NEM switch has demonstrated superior characteristics including quasi-zero leakage behaviour, excellent density capability and operation in(More)
Nanowires are being actively explored as promising nanostructured materials for high performance flexible electronics, biochemical sensors, photonic applications, solar cells, and secondary batteries. In particular, ultralong (centimeter-long) nanowires are highly attractive from the perspective of electronic performance, device throughput (or(More)
A rough surface can be a regular (engineered surface), a random (irregular rough surface), or an intermediate case (hierarchical rough surface). Whichever case is used for wettability, a truly superhydrophobic surface exhibits not only a high contact angle (>150 8) but also a low-contact-angle hysteresis (sliding angle). Quéré et al. theoretically described(More)
A simple liquid crystal display (LCD) backlight unit (BLU) comprising only a single-sheet polydimethylsiloxane (PDMS) light-guide plate (LGP) has been developed. The PDMS LGP, having micropatterns with an inverse-trapezoidal cross section, was fabricated by backside 3-D diffuser lithography followed by PDMS-to-PDMS replication. The fabricated BLU showed an(More)