July Galeano Zea

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This paper presents a visual measurement method able to sense 1D rigid body displacements with very high resolutions, large ranges and high processing rates. Sub-pixelic resolution is obtained thanks to a structured pattern placed on the target. The pattern is made of twin periodic grids with slightly different periods. The periodic frames are suited for(More)
—This paper presents a visual method for 1D in-plane displacement measurement which combines a resolution of a few nanometers with an unambiguous excursion range of 168 µm. Furthermore, position retrieval is only based on elementary phase computations and thus might become compatible with high-rate processing by implementing the processing algorithm on high(More)
This article concerns the characterization of the stability and performance of a motorized stage used in laser direct writing lithography. The system was built from commercial components and commanded by G-code. Measurements use a pseudo-periodic-pattern (PPP) observed by a camera and image processing is based on Fourier transform and phase measurement(More)
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