Joseph A. Bonafede

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The Survey and Time-domain Astrophysical Research eXplorer (STAR-X) science goals are to discover what powers the most violent explosions in the Universe, understand how black holes grow across cosmic time and mass scale, and measure how structure formation heats the majority of baryons in the Universe. To achieve these goals, STAR-X requires a powerful(More)
A comprehensive review of the development activities being undertaken at Cymer in the development of a CO<sub>2</sub> laser produced plasma (LPP) light source for EUV lithography is provided. A new and effective debris mitigation technique which greatly reduces the Ion Flux generated during exposure is also demonstrated.
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