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Selective stiction has been successfully applied to the batch fabrication of angular vertical comb actuators made of single-crystal silicon with self-aligned comb sets. The possible failure modes of the devices during the manufacturing process are studied, and a novel design of stiction plate and mechanical spring is also presented to suppress the failure(More)
Electric-field assisted growth and self-assembly of intrinsic silicon nanowires, in-situ, is demonstrated. The nanowires are seen to respond to the presence of a localized DC electric field set up between adjacent MEMS structures. The response is expressed in the form of improved nanowire order, alignment, and organization while transcending a gap. This(More)
We have demonstrated lithography-free, simple , and large area fabrication method for subwavelength antireflection structures (SAS) to achieve low reflectance of silicon (Si) surface. Thin film of Pt/Pd alloy on a Si substrate is melted and agglomerated into hemispheric nanodots by thermal dewetting process, and the array of the nanodots is used as etch(More)
An existing bond graph of a squirrel cage induction motor was modified to make the bond graph physically more representative. The intent was to form a one-to-one correspondence between motor components and bond graph elements. Components explicitly represented include the stator coils, the squirrel cage rotor bars, and the magnetic flux routing section. The(More)
—We have demonstrated microfabricated, monolithic two degrees of freedom (two-dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on-insulator wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The(More)
We propose a gas sensor operable over a wide temperature range and using suspended GaN nanowires functionalized with Pt-Pd. The sensor is batch-fabricated by directly integrating the GaN nanowires onto batch-processed silicon microelectrodes in parallel. The high thermal stability of the sensor originates from a large band gap of GaN nanowires that enables(More)
A polymer membrane-coated palladium (Pd) nanoparticle (NP)/single-layer graphene (SLG) hybrid sensor was fabricated for highly sensitive hydrogen gas (H2) sensing with gas selectivity. Pd NPs were deposited on SLG via the galvanic displacement reaction between graphene-buffered copper (Cu) and Pd ion. During the galvanic displacement reaction, graphene was(More)
The synthesis of cantilever-shape nano resonators and their resonant frequency tunings in both upward and downward directions have been demonstrated using FIB-CVD (focused ion beam-chemical vapor deposition). The in situ experimental observations of mechanical resonances as well as cutting and adding of resonator materials have been accomplished inside the(More)