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Selective stiction has been successfully applied to the batch fabrication of angular vertical comb actuators made of single-crystal silicon with self-aligned comb sets. The possible failure modes of the devices during the manufacturing process are studied, and a novel design of stiction plate and mechanical spring is also presented to suppress the failure(More)
Electric-field assisted growth and self-assembly of intrinsic silicon nanowires, in-situ, is demonstrated. The nanowires are seen to respond to the presence of a localized DC electric field set up between adjacent MEMS structures. The response is expressed in the form of improved nanowire order, alignment, and organization while transcending a gap. This(More)
An existing bond graph of a squirrel cage induction motor was modified to make the bond graph physically more representative. The intent was to form a one-to-one correspondence between motor components and bond graph elements. Components explicitly represented include the stator coils, the squirrel cage rotor bars, and the magnetic flux routing section. The(More)
We have demonstrated lithography-free, simple , and large area fabrication method for subwavelength antireflection structures (SAS) to achieve low reflectance of silicon (Si) surface. Thin film of Pt/Pd alloy on a Si substrate is melted and agglomerated into hemispheric nanodots by thermal dewetting process, and the array of the nanodots is used as etch(More)
—We have demonstrated microfabricated, monolithic two degrees of freedom (two-dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on-insulator wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The(More)
Facile electron-beam lithography technique for irregular and fragile substrates", complementary graphene field effect transistors and junctions via near-field electrospinning", Small, 2014 (I.F. Zettl and William Mickelson, "Catalytic hydrogen sensing using microheated platinum nanoparticle-loaded graphene aerogel",A new near infrared-mechano responsive(More)
We report a unique approach for the patterned growth of single-crystalline tungsten oxide (WOx) nanowires based on localized stress-induction. Ions implanted into the desired growth area of WOx thin films lead to a local increase in the compressive stress, leading to the growth of nanowire at lower temperatures (600 °C vs. 750-900 °C) than for equivalent(More)
Catalytic iron nanoparticles generated by spark discharge were used to site-selectively grow carbon nanotubes (CNTs) and control their density. The generated aerosol nanoparticles were deposited on a cooled substrate by thermophoresis. The shadow mask on top of the cooled substrate enabled patterning of the catalytic nanoparticles and, thereby, patterning(More)