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Journals and Conferences
Coherent EUV light at 13.5 nm was generated by high-harmonic generation using a 35-fs pulsed laser at 796 nm in Ne gas, which showed stable operation within 5% deviation over an hour.
We developed a coherent scattering microscope (CSM) for actinic EUV mask inspection. The CSM system was designed to measure critical dimensions down to 88 nm, and 200 nm l/s patterns were… (More)
An innovative flash LIDAR (light detection and ranging) system with high spatial resolution and high range precision is proposed in this paper. The proposed system consists of a polarization… (More)