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A design procedure for a MEMS capacitive switch with a focus on the circuit designer's requirements is presented. A MEMS switch is designed, fabricated and characterized with physical and RF measurements for inclusion in simulations. Using the MEMS switch models, a dual-band LNA operating at 2.4 GHz and 5.2 GHz, and a tunable power amplifier at 5.2 GHz are(More)
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