Johannes von Borany

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Time of flight backscattering spectrometry (ToF-BS) was successfully implemented in a helium ion microscope (HIM). Its integration introduces the ability to perform laterally resolved elemental analysis as well as elemental depth profiling on the nm scale. A lateral resolution of ≤54nm and a time resolution of Δt≤17ns(Δt/t≤5.4%) are achieved. By using the(More)
Through the well defined range of charged particles in matter, cancer irradiation by means of ions can be very tumor conformal. However, external range verification is needed to fully exploit the advantages of ion beam therapy. Nuclear interactions between the projectiles and targets result in excited nuclei which emit photons in the MeV energy range during(More)
Ge:SiO(x)/SiO(2) multilayers are fabricated using a new reactive dc magnetron sputtering approach. The influence of the multilayer stoichiometry on the ternary Ge-Si-O phase separation and the subsequent size-controlled Ge nanocrystal formation is explored by means of x-ray absorption spectroscopy, x-ray diffraction, electron microscopy and Raman(More)
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