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  • Daniel G. Coronell, David E. Hansen, Arthur F. Voter, Chun-li Liu, Xiang-Yang Liu, Joel D. Kress
  • Physics
  • 1998 (First Publication: 28 December 1998)
  • A procedure is presented for incorporating the results of atomistic simulations of ion–surface interactions into integrated circuit topographic simulations of ionized physical vapor deposition (PVD).Continue Reading