Joao Pedro Conde

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Thin-film MEMS bridges as micro-resonators have proven attractive for various sensing applications (acceleration, mass, chemical, pressure, etc.) by using frequency shift as a basis for sensing [1]. Low-temperature processing of amorphous-silicon (a-Si:H) enables low-cost fabrication of high-Q MEMS bridges having excellent compatibility with CMOS post(More)
Although, the precise molecular mechanisms underlying Parkinson's disease (PD) are still elusive, it is now known that spreading of alpha-synuclein (aSyn) pathology and neuroinflammation are important players in disease progression. Here, we developed a novel microfluidic cell-culture platform for studying the communication between two different cell(More)
—Thin-film MEMS resonators fabricated at low temperatures can be processed on CMOS ICs, forming high-sensitivity transducers within complete sensing systems. A key focus for the MEMS devices is increasing the resonant frequency, enabling, among other benefits, operation at atmospheric pressure. However , at increased frequencies, parasitics associated with(More)
71 hydrogen plasma treatment 3.6 SUMMARY Room temperature exposure to a RF hydrogen plasma can dramatically reduce the thermal budget for the crystallization of PECVD a-Si:H films. The hydrogen plasma treatment changes the microstructure of the q-Si:Hat the surface, and depletes hydrogen from the surface of the film. The plasma treatment creates seed nuclei(More)
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