Joao Pedro Conde

We don’t have enough information about this author to calculate their statistics. If you think this is an error let us know.
Learn More
—Thin-film MEMS resonators fabricated at low temperatures can be processed on CMOS ICs, forming high-sensitivity transducers within complete sensing systems. A key focus for the MEMS devices is increasing the resonant frequency, enabling, among other benefits, operation at atmospheric pressure. However , at increased frequencies, parasitics associated with(More)
Thin-film MEMS bridges as micro-resonators have proven attractive for various sensing applications (acceleration, mass, chemical, pressure, etc.) by using frequency shift as a basis for sensing [1]. Low-temperature processing of amorphous-silicon (a-Si:H) enables low-cost fabrication of high-Q MEMS bridges having excellent compatibility with CMOS post(More)
  • 1